Abstract ISO 25178-605:2014 describes the metrological characteristics of a non-contact instrument for measuring surface texture using point autofocus probing.
Abstract ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.
Abstract ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
Abstract ISO 25178-602:2010 specifies the design and metrological characteristics of a particular non-contact instrument for measuring surface texture using a confocal chromatic probe based on axial chromatic dispersion of white light.
Abstract ISO 25178-601:2010 defines the metrological characteristics of contact (stylus) areal surface texture measuring instruments.
Abstract This document specifies the metrological characteristics of areal instruments for measuring surface topography. Because surface profiles can be extracted from surface topography images, most of the terms defined in this document can also be applied to profiling measurements.
Abstract ISO 25178-72:2017 defines the XML file format x3p for storage and exchange of topography and profile data.
Abstract ISO 25178-71:2017 defines Type S1 and Type S2 software measurement standards (etalons) for verifying the software of measuring instruments. It also defines the file format of Type S1 software measurement standards for the calibration of instruments for the measurement of surface texture by the areal method as defined in the areal surface texture chain…
Abstract ISO 25178-70:2014 specifies the characteristics of material measures used for the periodic verification and adjustment of areal surface texture measurement instruments.
Abstract ISO 25178-6:2010 describes a classification system for methods used primarily for the measurement of surface texture. It defines three classes of methods, illustrates the relationships between the classes, and briefly describes specific methods.
Abstract This part of ISO 25178 specifies the complete specification operator for surface texture (scale limited surfaces) by areal methods.
