Novel multi-wave standards for the calibration of form measuring instruments – O. Jusco and F. Ludicke

Abstract

The calibration of form measurement instruments generally is performed by calibration standards. Current available standards are only restrictedly suited for this purpose. Therefore novel standards have been developed which embody several superimposed sinusoidal waves on a cylindrical surface. It is shown that by their application the calibration of form measurement instruments can be significantly improved.