ASTM F1048-87, Standard Test Method for Measuring the Effective Surface Roughness of Optical Components by Total Integrated Scattering
Primary Standard: ASTM
Scope
This standard was transferred to SEMI (www.semi.org) May 2003
1.1 This test method covers the measurement of the effective surface roughness of an opaque reflecting surface as determined by the total integrated light scattering (TIS).