Surface Metrology

Comparison of optical and stylus methods for measurement of surface texture -T. V. Vorburger et al.

Abstract Optical methods are increasingly used for measurement of surface texture, particularly for areal measurements where the optical methods are generally faster. A new Working Group under Technical Committee (TC) 213 in the International Organization for Standardization is addressing standardization issues for areal surface texture measurement and characterization and has formed a project team to…

Read More Comparison of optical and stylus methods for measurement of surface texture -T. V. Vorburger et al.
A review of selected topics in interferometric optical metrology – P. J. de Groot

Abstract This review gathers together 15 special topics in modern interferometric metrology representing a sampling of historical, current and future developments. The selected topics cover a wide range of applications, including distance and displacement measurement, the testing of optical components, interference microscopy for surface structure analysis, form and dimensional measurements of industrial parts, and recent…

Read More A review of selected topics in interferometric optical metrology – P. J. de Groot
Roughness form and waviness measurement by means of light scattering – R. Brodmann

This paper deals with a non-contact, optical measuring method which unitesthe assessment of roughness form and waviness in one single instrumenL Themethod is based on the deflection of light which leads to a more or less broadscattered light distribution in the case of roughness and to a shift of the totaldistribution curve due to waviness…

Read More Roughness form and waviness measurement by means of light scattering – R. Brodmann
An internet based surface texture information system – Son H. Bui, V. Gopalan, J. Raja

Abstract This paper presents an internet based surface texture analysis and information system, which appliesJava and internet technology to engineering metrology. The system includes most of the standardized andadvanced analysis tools and a database for surface texture. The most distinct feature of this system is thatit can run on the internet, which enables platform independent…

Read More An internet based surface texture information system – Son H. Bui, V. Gopalan, J. Raja
Analysis of lay characteristics of three-dimensional surface maps – B. Boudreau and J. Raja

Abstract This paper describes a technique which can characterize the surface lay structure contained within a three-dimensional surface map. The technique is based on a generally known fact, that two, closely spaced, parallel profiles will appear shifted whenever the dominant lay direction is not perpendicular to the profile direction. The cross-correlation function is utilized to…

Read More Analysis of lay characteristics of three-dimensional surface maps – B. Boudreau and J. Raja
The geometrical state of the surface of a solid – H. von Weingraber

The functional performance of two surfaces in contact depends upon their material properties as well as their geometrical properties. The physical and chemical properties that a surface acquires during machining can be very different from those of the underlying undisturbed material. They are just as important for a complete typological description as the geometrical state,…

Read More The geometrical state of the surface of a solid – H. von Weingraber
Focus variation – a robust technology for high resolution optical 3D surface metrology – Reinhard Danzl, Franz Helmli, Stefan Scherer

This article describes and evaluates the focus variation method, an optical 3D measurementtechnique. The goal is to analyse the performance of the method on a series of typical measurement tasksincluding roughness measurements, form and wear measurements. First, a comparison of roughnessmeasurements between the proposed method and a tactile device on a newly developed roughness standardis…

Read More Focus variation – a robust technology for high resolution optical 3D surface metrology – Reinhard Danzl, Franz Helmli, Stefan Scherer
Surface metrology – D. J. Whitehouse

A review article Abstract Some important types of instrumentation for measuring surfaces both past and present are reviewed. Exhaustive lists of instruments and performance are not presented; rather more emphasis is placed on the philosophy of measurement. An attempt is made to classify the surface features and also the function of surfaces as a pre-requisite…

Read More Surface metrology – D. J. Whitehouse
Contribution of ClRP to the development of metrology and surface quality evaluation during the last fifty years – J. Peters (PMA-KU Leuven) et al.

Abstract An overview of the contribution of the members of the C.I.R.P. community to the progress of Metrology andSurface Roughness Quality Evaluation is given. The following items are included in the part on metrology: briefoverview of the existing situation before 1950, contribution to the successive definitions of the unit of length andrelated reference length standards,…

Read More Contribution of ClRP to the development of metrology and surface quality evaluation during the last fifty years – J. Peters (PMA-KU Leuven) et al.
Surface metrology 2000+ – D. J. Whitehouse

Abstract The role of surface metrology is explained. It is shown how it has changed over the years and how it is likely to develop. Emphasis is placed on the underlying philosophy rather than on description of individual instruments. It is shown how the classification of workpiece performance is related to surface typology and manufacturing…

Read More Surface metrology 2000+ – D. J. Whitehouse
Characterization of engineered surfaces – R. Verma and J. Raja

Abstract In the recent years there has been an increasing interest in designing surfaces to meet a particular functional requirement. Examples include surfaces generated using microreplication and micro-structure technology. The surface analysis techniques currently available only deals with the two-dimensional characterization of the three-dimensional surfaces. There is a growing need to develop an intelligent surface…

Read More Characterization of engineered surfaces – R. Verma and J. Raja
Design and verification of geometric roughness standards by reverse engineering – J. Seewig et al.

In order to ensure a reliable calibration of surface topography measuring instruments the use of practical calibration strategies is required. This requirement can be fulfilled when measurement standards with a defined surface structure in accordance to the later obsessed application are used. Different examples for the design and manufacturing of accordant measurement standards have been…

Read More Design and verification of geometric roughness standards by reverse engineering – J. Seewig et al.