Surface Metrology

Abstract This review gathers together 15 special topics in modern interferometric metrology representing a sampling of historical, current and future developments. The selected topics cover a wide range of applications, including distance and displacement measurement, the testing of optical components, interference microscopy for surface structure analysis, form and dimensional measurements of industrial parts, and recent…

This paper deals with a non-contact, optical measuring method which unitesthe assessment of roughness form and waviness in one single instrumenL Themethod is based on the deflection of light which leads to a more or less broadscattered light distribution in the case of roughness and to a shift of the totaldistribution curve due to waviness…

Abstract This paper presents an internet based surface texture analysis and information system, which appliesJava and internet technology to engineering metrology. The system includes most of the standardized andadvanced analysis tools and a database for surface texture. The most distinct feature of this system is thatit can run on the internet, which enables platform independent…

Abstract This paper describes a technique which can characterize the surface lay structure contained within a three-dimensional surface map. The technique is based on a generally known fact, that two, closely spaced, parallel profiles will appear shifted whenever the dominant lay direction is not perpendicular to the profile direction. The cross-correlation function is utilized to…

This article describes and evaluates the focus variation method, an optical 3D measurementtechnique. The goal is to analyse the performance of the method on a series of typical measurement tasksincluding roughness measurements, form and wear measurements. First, a comparison of roughnessmeasurements between the proposed method and a tactile device on a newly developed roughness standardis…

A review article Abstract Some important types of instrumentation for measuring surfaces both past and present are reviewed. Exhaustive lists of instruments and performance are not presented; rather more emphasis is placed on the philosophy of measurement. An attempt is made to classify the surface features and also the function of surfaces as a pre-requisite…