Surface profiles obtained by means of optical methods—are they true representations of the real surface? – W. Hillmann

Abstract

The surface profile of the Well known surface of a PTB roughness standard has been
recorded by several methods and the results have been compared. The result of the contact
stylus method, in particular that using a very small tip radius, is in good conformity with that
deduced from SEM stereo images. The optical methods, ie laser focus system and
interference microscope with image processing, result significant deviations. On the other
hand, when the surface of a diamond turned copper mirror is measured, there is a difference