Optical techniques for on-line measurement of surface topography – T.V. Vorburger and E.C. Teague

Abstract

Optical techniques have great potential for non-destructive and on-line measurements of surface roughness during manufacturing. This paper reviews the state-of-the-art in a number of optical techniques including specular reflectance, total integrated scatter, diffuseness, angular scattering distributions, speckle, ellipsometry, and interferometry. The distinction is drawn between the more quantitative but slower profiling techniques and less quantitative, parametric techniques, which are faster and hence more useful for high-speed monitoring of surfaces. Overall, no currently available technique combines accuracy and speed and is therefore suitable as an on-line metrological tool for roughness measurement of engineering surfaces. Speckle techniques hold perhaps the greatest potential as accurate, high-speed metrological tools