ISO 25178-607:2019 – (GPS) — Surface texture: Areal — Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments
Primary Standard: ISO
Abstract
This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.